Plasma Generator and Method of Generating Plasma Using the Same

Abstract

A plasma generator in which the variation of the impedance in the cavity before and after plasma is ignited is less and hardly affected by the shape of the cavity, and the ignitability of the plasma is improved and a method of generating plasma using the plasma generator are provided. The plasma generator comprises a nonconductive gas flow pipe (1) for introducing a gas (9) for generating plasma and discharging it into the atmosphere and a conductive antenna pipe (2) surrounding the gas flow pipe. A microwave (7) is applied to the antenna pipe to change the gas in the gas flow pipe into plasma. The plasma generator is characterized in that a slit (3) with a predetermined length is formed in the antenna pipe (2) along the axial direction of the gas flow pipe. Preferably, the plasma generator is characterized in that the length of the slit is an integral multiple of the half-wave length of the applied microwave.

Dependencies are inferred from the claim text.