Processing system, processing method and recording medium

A processing method of processing a workpiece placed in a processing space defined by a processing vessel, said processing method comprising the steps of:

• carrying a workpiece through an opening formed in a vessel body of the processing vessel into the vessel body;
• covering the opening by a lid of the processing vessel to close the processing space, forming a low-pressure space of a pressure lower than that in the processing space on the outer side of the processing space, and creating a normally sealed state where a space outside the processing vessel, the low-pressure space and the processing space are isolated from each other;
• and
• evacuating the low-pressure space at a pressure such that pressure in the processing vessel is not higher than pressure in the space outside the processing vessel in an internal leakage state where the processing space and the low-pressure space isolated from the space outside the processing vessel communicate with each other, and processing the workpiece placed in the processing space.

A recording medium storing a program for a computer for controlling a processing system to execute to control the processing system to carry out a processing method of processing a workpiece placed in a processing space defined by a processing vessel, wherein said processing method comprises the steps of:

• carrying a workpiece through an opening formed in a vessel body of the processing vessel into the vessel body;
• covering the opening by a lid of the processing vessel to close the processing space, forming a low-pressure space of a pressure lower than that in the processing space on the outer side of the processing space, and creating a normally sealed state where a space outside the processing vessel, the low-pressure space and the processing space are isolated from each other;
• and
• evacuating the low-pressure space at a pressure such that pressure in the processing vessel is not higher than pressure in the space outside the processing vessel in an internal leakage state where the processing space and the low-pressure space isolated from the space outside the processing vessel communicate with each other, and processing the workpiece placed in the processing space.