US 2009/0260566 A1Published application

Mask support, mask assembly, and assembly comprising a mask support and a mask

AssigneeApplied Materials, Inc.

InventorsHeike Landgraf, Uwe Schuessler, Stefan Bangert

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Abstract

A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.

Claims15

Dependent claims

A mask support for supporting a mask, particularly for supporting a laminar mask for use in an OLED coating device, comprising a frame element and a plurality of elastic elements;

wherein both a first elastic element and a second elastic element of said plurality of elastic elements comprise a first engagement means arranged at said first elastic element and a said second elastic element, respectively, for engagement with a corresponding second engagement means provided at said mask assembly for carrying said mask;
wherein said elastic elements are configured for fixing said mask to said frame element and for stretching said mask supported in said frame element by pushing an edge portion of said mask away from said frame element, and said first elastic element and said second elastic element are arranged adjacent to each other along a substantially straight edge of said frame element.

Dependencies are inferred from the claim text.

Facts

Application: 12/244,488Filed 2 Oct 2008
Priority: EP EP08103619.618 Apr 2008
Published: 22 Oct 2009
Term ends: Not estimatedThe source records don’t support an estimate.

Classification12 codes

C23C 14/042
Coating on selected surface areas, e.g. using masks: using masks
C23C 14/04
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material: coating on selected surface areas, e.g. using…
G03F 7/12
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g.…
B05C 21/005
Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00…

Family

Application61/046,133Us provisional application · filed 18 Apr 2008
US 2009/0260566 A1This patent

From the US filing history. Foreign family members aren’t listed.

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