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US 2009/0260448 A1Published application
Apparatus for Measuring Pressure by Using Diaphragm and Method of Pressure Measurement by Using Diaphragm
AssigneeKorea Research Institute of Standards and Science
InventorsSeung Soo Hong, Yong Hyeon Shin, Jin Tae Kim
Life of this patent
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Abstract
The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressure of atmospheric pressure or more without having a getter pump by fixedly mounting a pressure variable container on a sensor housing having a diaphragm mounted therein.
Claims5
An apparatus for measuring pressure by using a diaphragm comprising:
- a diaphragm sensor including a sensor housing formed with a first opening and a second opening, a diaphragm mounted between the first opening and the second opening to spatially isolate the first opening and the second opening from each other and provided with a conducive part, an electrode substrate formed with a through hole to form a channel between the second opening and the diaphragm and mounted between the second opening and the diaphragm, and an electrode attached to the electrode substrate to face the diaphragm;
- and
- a pressure variable container formed with a third opening and a fourth opening and on which the sensor housing is fixed to communicate the second opening with the third opening.
Dependencies are inferred from the claim text.