Diaphragm flexure with large range and high load capacity
AssigneeMassachusetts Institute of Technology
InventorsVijay Shilpiekandula, Kamal Youcef-Toumi
Life of this patent
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Abstract
A stamping structure for imprinting micro-sized features is provided. The stamping structure includes a flexure arrangement having one or more diaphragm flexures arranged in a series or parallel or hybrid configuration so as to manage load-capacity while still achieving adequate vertical and angular range of a sample supported on the one or more diaphragm flexures.
Claims16
A stamping structure for imprinting micro-sized features comprising a flexure arrangement having one or more diaphragm flexures arranged in a series or parallel or hybrid configuration so as to manage load-capacity while still achieving adequate vertical and angular range of a sample supported on the one or more diaphragm flexures.
A method of forming a stamping structure for imprinting micro-sized features comprising:
- providing one or more diaphragm flexures;
- arranging said one or more diaphragm flexures in a series or parallel or hybrid configuration so as to manage load-capacity while still achieving adequate vertical and angular range of a sample supported on the one or more diaphragm flexures.
Dependencies are inferred from the claim text.