Plasma generating apparatus, deposition apparatus, and deposition method

Abstract

A plasma generating apparatus emits a plasma beam from a plasma gun and thereafter deforms the emitted plasma beam by a pair of opposing first magnets arranged to sandwich the plasma beam. The plasma generating apparatus includes at least one second magnet which is arranged between the plasma gun and the first magnets, includes a hole through which the plasma beam passes and a magnet portion of it extending outside from the hole in a direction perpendicular to the plasma beam, and forms a magnetic field having magnetic lines reaching outside from the hole or reaching the hole from outside. At least one second magnet concentrates the emitted plasma beam.

Dependencies are inferred from the claim text.