MEMS oscillator

Abstract

A discharge electrode is provided on the opposite side of a fixed electrode with a beam portion being sandwiched therebetween. When the frequency of the MEMS oscillator is regulated by increasing the mass of a vibration element, the vibration element is used as a positive electrode and the discharge electrode as a negative electrode, and a direct current voltage is applied until an arc discharge occurs. When an arc discharge occurs between the vibration element and discharge electrode, an inert gas is ionized to become positive ions to collide against the discharge electrode to sputter or evaporate the material of the discharge electrode. A portion of discharged material from the discharge electrode adheres to the vibration element, therefore, the mass of the vibration element is increased to reduce a resonance frequency of the MEMS oscillator.

Dependencies are inferred from the claim text.