Large Area Roll-To-Roll Imprint Lithography
AssigneesMolecular Imprints, Inc., Board of Regents, The University of Texas System
InventorsSidlgata V. Sreenivasan, Shrawan Singhal, Byung Jin Choi, Ian Matthew McMackin
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Abstract
Droplets of polymerizable material may be patterned on a film sheet. The droplets of polymerizable material may be dispensed on the film sheet. A pre-determined force may be applied to an imprint lithography template such that localized trapping of the droplets of the polymerizable material on the film sheet is minimized and the droplets coalesce to form a continuous layer. The polymerizable material may be solidified to form a patterned layer having a residual layer and at least one feature.
Claims23
A method for patterning polymerizable material on a film sheet, comprising:
- dispensing a plurality of droplets of polymerizable material on the film sheet;
- applying a force to a first imprint lithography template such that the first imprint lithography template contacts the droplets of polymerizable material on the film sheet, wherein the force is pre-determined to minimize localized trapping of the droplets of the polymerizable material on the film sheet such that droplets coalesce to form a continuous layer during contact with the first imprint lithography template;
- and,
- solidifying the polymerizable material to form a patterned layer having a residual layer and at least one feature.
The method of claim of 1, further comprising patterning a second patterned layer on the patterned layer with a second imprint lithography template, wherein the second imprint lithography template is positioned offset from the polymerizable material during formation of the patterned layer with the first imprint lithography template and the first imprint lithography template is positioned offset from the patterned layer during patterning with the second imprint lithography template.
A method for patterning polymerizable material on a film sheet, comprising
- dispensing a plurality of droplets of a first polymerizable material on a first region of the film sheet, the first region of the film sheet in superimposition with a first imprint lithography template;
- applying a first force to the first lithography template such that the first imprint lithography template contacts the droplets of polymerizable material on the film sheet, wherein the first force is pre-determined to minimize localized trapping of the droplets of the first polymerizable material on the first region of the film sheet such that droplets of the first polymerizable material coalesce to form a first continuous layer during contact with the first imprint lithography template;
- solidifying the first polymerizable material;
- adjusting rollers to provide the first region of the film sheet in superimposition with a second imprint lithography template;
- dispensing a plurality of droplets of a second polymerizable material on the first region of the film sheet;
- applying a second force to the second lithography template such that the second imprint lithography template contacts the droplets of the second polymerizable material on the first region of the film sheet, wherein the second force is pre-determined to minimize localized trapping of the droplets of the second polymerizable material on the first region of the film sheet such that the droplets of the second polymerizable material coalesce to form a second continuous layer during contact with the second imprint lithography template;
- and,
- solidifying the second polymerizable material.
Dependencies are inferred from the claim text.