Semiconductor integrated circuit and layout method for the same
AssigneeNEC Electronics Corporation
InventorTomokazu ITO
Life of this patent
Estimating the term…
Abstract
A semi conductor integrated circuit includes a first via-contact configured to connect a first interconnection pattern provided for a first interconnection layer and a second interconnection pattern provided for a second interconnection layer, and a second via-contact configured to connect a third interconnection pattern provided for the first interconnection layer and the second interconnection pattern. A redundant interconnection pattern is formed in the first interconnection layer and configured to connect the first interconnection pattern and the third interconnection pattern to overlap above the second interconnection pattern.
Claims10
A semiconductor integrated circuit comprising:
- a first via-contact configured to connect a first interconnection pattern provided for a first interconnection layer and a second interconnection pattern provided for a second interconnection layer;
- a second via-contact configured to connect a third interconnection pattern provided for said first interconnection layer and said second interconnection pattern;
- and
- a redundant interconnection pattern formed in said first interconnection layer and configured to connect said first interconnection pattern and said third interconnection pattern to overlap above said second interconnection pattern.
A layout method of a semiconductor integrated circuit, comprising:
- determining an interconnection layout of a semiconductor integrated circuit based on a netlist, a cell library and a connection rule;
- specifying a first interconnection layer, a second interconnection layer, a first via-contact and a second via-contact, wherein an interlayer insulating film is provided between said first interconnection layer and said second interconnection layer, and said first and second via-contacts are formed in said interlayer insulating film, and applied with a same voltage;
- checking whether or not a line between said first and second via-contacts extends along one of an X-axis and a Y-axis;
- checking a first interconnection pattern in said first interconnection layer of whether or not said first interconnection pattern is provided to connect said first and second via-contacts at their first ends, when the line extends along one of the X-axis and the Y-axis;
- checking whether or not said first interconnection pattern is a linear pattern;
- providing a redundant interconnection pattern to connect said first and second via-contacts at their second ends opposite to the first ends, when said first interconnection pattern is a linear pattern;
- and
- performing a design rule check on an interconnection layout with said redundant interconnection pattern added.
A computer-readable recording medium in which a computer-readable program code is stored to realize a layout method of a semiconductor integrated circuit, wherein said layout method comprises:
- determining an interconnection layout of a semiconductor integrated circuit based on a netlist, a cell library and a connection rule;
- specifying a first interconnection layer, a second interconnection layer, a first via-contact and a second via-contact, wherein an interlayer insulating film is provided between said first interconnection layer and said second interconnection layer, and said first and second via-contacts are formed in said interlayer insulating film, and applied with a same voltage;
- checking whether or not a line between said first and second via-contacts extends along one of an X-axis and a Y-axis;
- checking a first interconnection pattern in said first interconnection layer of whether or not said first interconnection pattern is provided to connect said first and second via-contacts at their first ends, when the line extends along one of the X-axis and the Y-axis;
- checking whether or not said first interconnection pattern is a linear pattern;
- providing a redundant interconnection pattern to connect said first and second via-contacts at their second ends opposite to the first ends, when said first interconnection pattern is a linear pattern;
- and
- performing g a design rule check on an interconnection layout with said redundant interconnection pattern added.
Dependencies are inferred from the claim text.