Apparatus and methods for supplying fuel employed by abatement systems to effectively abate effluents
AssigneeApplied Materials, Inc.
InventorsDaniel O. Clark, Allen G. Fox, Robbert M. Vermeulen, Shaun W. Crawford
Life of this patent
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Abstract
An abatement apparatus for introducing fuel into an electronic device manufacturing effluent abatement tool, including: a manifold; a fuel source adapted to supply fuel to the manifold through a fuel conduit; and a plurality of nozzles adapted to receive fuel from the manifold; wherein the manifold is adapted to supply fuel to the nozzles at a fuel velocity greater than a flame velocity.
Claims19
An apparatus for introducing fuel into an electronic device manufacturing effluent abatement tool, comprising:
- a manifold;
- a fuel source adapted to supply fuel to the manifold through a fuel conduit;
- and
- a plurality of nozzles adapted to receive fuel from the manifold;
- wherein the manifold is adapted to supply fuel to the nozzles at a fuel velocity greater than a flame velocity.
A method for operating an electronic device manufacturing abatement system, comprising:
- flowing fuel from a fuel supply into a manifold through a fuel conduit;
- and
- flowing the fuel from the manifold through a plurality of nozzles;
- wherein the manifold is adapted to flow fuel to the nozzles at a fuel velocity greater than a flame velocity.
Dependencies are inferred from the claim text.