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AssigneeApplied Materials, Inc.
InventorsJennifer Y. Sun, Xiaoming He, Kenneth S. Collins, Thomas Graves, Senh Thach, Jie Yuan, Li Xu, Ren-Guan Duan
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Particulate generation has been a problem in semiconductor device processing in highly corrosive plasma environments. The problem is exacerbated when the plasma is a reducing plasma. Empirically produced data has shown that the formation of a plasma spray coated yttrium-comprising ceramic such as yttrium oxide, Y2O3—ZrO2 solid solution, YAG, and YF3 provides a low porosity coating with smooth and compacted surfaces when such ceramics are spray coated from a powder feed having an average effective diameter ranging from about 22 μm to about 0.1 μm. These spray-coated materials reduce the generation of particulates in corrosive reducing plasma environments.
An article which is resistant to corrosion or erosion by chemically active reducing plasmas, said article comprising a metal or metal alloy substrate having on its surface a spray coated yttrium-comprising ceramic material, wherein a porosity of said ceramic coating is less than 1.5%.
A method of fabricating an article which is resistant to corrosion or erosion by chemically active reducing plasmas, comprising:
A method of fabricating an article which is resistant to corrosion or erosion by chemically active reducing plasmas, comprising:
Dependencies are inferred from the claim text.