Multiple ampoule delivery systems

A method for delivery of a vapor phase reagent to a deposition chamber comprising:

• (a) providing an integrated liquid phase reagent dispensing apparatus comprising:
• a plurality of vessels, each vessel comprising a top wall member, a sidewall member and a bottom wall member configured to form an internal vessel compartment to hold a source chemical up to a fill level and to additionally define an inner gas volume above the fill level;
• a portion of the top wall member having an inert gas feed inlet opening through which said inert gas can be fed into the inner gas volume above the fill level to pressurize the inner gas volume above the fill level;
• and a portion of the top wall member having a liquid phase reagent outlet opening comprising a diptube that extends through the inner gas volume into the source chemical and through which liquid phase reagent can be dispensed from said apparatus, said diptube having an outlet end adjacent to the top wall member and an inlet end adjacent to the bottom wall member;
• a plurality of inert gas feed/liquid phase reagent delivery manifolds, each of said inert gas feed/liquid phase reagent delivery manifolds interconnected with each other;
• each vessel connected to at least one inert gas feed/liquid phase reagent delivery manifold;
• each inert gas feed/liquid phase reagent delivery manifold comprising an inert gas feed line and a liquid phase reagent discharge line;
• said inert gas feed line extending from the inert gas feed inlet opening upwardly and exteriorly from the top wall member for delivery of inert gas into said inner gas volume above the fill level, the inert gas feed line containing one or more inert gas flow control valves therein for control of flow of the inert gas therethrough;
• and said liquid phase reagent discharge line extending from the liquid phase reagent outlet opening upwardly and exteriorly from the top wall member for removal of liquid phase reagent from said vessel, the liquid phase reagent discharge line optionally containing one or more liquid phase reagent flow control valves therein for control of flow of the liquid phase reagent therethrough;
• and
• one or more controllers for directing communication with each of said inert gas feed/liquid phase reagent delivery manifolds and each of said vessels, in such a way that each of said inert gas feed/liquid phase reagent delivery manifolds are operable independently of one another, and each of said vessels are operable independently of one another;
• (b) adding source chemical to one or more of said vessels;
• (c) optionally heating a solid source chemical in one or more of said vessels to a temperature sufficient to melt the solid source chemical to provide liquid phase reagent;
• (d) feeding an inert gas into one or more of said vessels through said inert gas feed line;
• (e) withdrawing liquid phase reagent from one of said vessels, independently of any other of said vessels, through said diptube and said liquid phase reagent discharge line;
• (f) providing a vaporization apparatus comprising:
• a vessel which comprises a top wall member, a sidewall member and a bottom wall member configured to form an internal vessel compartment to vaporize the liquid phase reagent;
• said liquid phase reagent discharge line connecting the integrated liquid phase reagent dispensing apparatus to said vaporization apparatus;
• a portion of the vaporization apparatus having a carrier gas feed inlet opening through which carrier gas can be fed into said vaporization apparatus to cause vapor of said liquid phase reagent to become entrained in said carrier gas to produce vapor phase reagent;
• a portion of the vaporization apparatus having a vapor phase reagent outlet opening through which said vapor phase reagent can be dispensed from said vaporization apparatus;
• a carrier gas feed line extending from the carrier gas feed inlet opening upwardly and exteriorly from the vaporization apparatus for delivery of carrier gas into said vaporization apparatus, the carrier gas feed line containing one or more carrier gas flow control valves therein for control of flow of the carrier gas therethrough;
• a vapor phase reagent discharge line extending from the vapor phase reagent outlet opening upwardly and exteriorly from the vaporization apparatus for removal of vapor phase reagent from said vaporization apparatus to said deposition chamber, the vapor phase reagent discharge line containing one or more vapor phase reagent flow control valves therein for control of flow of the vapor phase reagent therethrough;
• (g) feeding the liquid phase reagent into said vaporization apparatus;
• (h) heating the liquid phase reagent in said vaporization apparatus to a temperature sufficient to vaporize the liquid phase reagent to provide said vapor phase reagent;
• (i) feeding a carrier gas into said vaporization apparatus through said carrier gas feed line;
• (j) withdrawing the vapor phase reagent and carrier gas from said vaporization apparatus through said vapor phase reagent discharge line;
• and
• (k) feeding the vapor phase reagent and carrier gas into said deposition chamber.