Apparatus for ion nitriding an aluminum alloy part and process employing such apparatus
OwnerFrederic Guernalec, Denis Busardoinventors
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Abstract
The invention relates to a device for implanting ions in an aluminium alloy part (5), said device comprising an ion source (6) supplying ions accelerated by an extraction voltage, and first means for regulating (7-11) an initial beam (f1′) of ions emitted by said source (6) to form an implantation beam (f1). The source (6) is an electronic cyclotronic resonance source generating the initial beam (f1′) of multi-energy ions that are implanted in the part (5) at a temperature below 120° C. The implantation of said multi-energy ions of the implantation beam (f1) regulated by the regulating means (7-11) is simultaneously carried out at a depth controlled by the extraction voltage of the source.
Claims12
An apparatus for implanting ions in an aluminum alloy element (5), comprising a source (6) for delivering ions accelerated by an extraction voltage, and a first adjusting means (7-11) for adjusting an initial beam (f1′) of ions emitted by said source (6) into an implantation beam (f1), wherein said source (6) is an electron cyclotron source producing multi-energy ions that are implanted in the element (5) at a temperature below 120° C. , the implantation of the multi-energy ions from the implantation beam (f1) being effected simultaneously at a depth controlled by the extraction voltage of the source.
Dependencies are inferred from the claim text.