Method for Microstructuring Solid Surfaces
AssigneeFra Unhofer-Gesellschaft Zur FöRderung Der Angewan
InventorsKuno Mayer, Daniel Kray, Sybille Hopman, Bernd O. Kolbesen
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Abstract
The invention relates to a method for microstructuring solid surfaces by chemical or electrochemical etching, in which the solid surface is treated with an etching fluid with formation of intermediate products which are insoluble or low-soluble in the etching fluid. By additional use of a particle stream, these intermediate products can be removed in a simple manner. Associated herewith is the advantage that low damage microstructuring of solid bodies is made possible.
Claims12
A method for microstructuring solid surfaces by chemical or electrochemical etching, comprising:
- treating the solid surface with a liquid etching medium;
- forming intermediate products wherein the intermediate products are insoluble in the liquid etching medium;
- and
- removing the intermediate products with a simultaneous or subsequent tribological treatment of the solid surface with at least one particle stream, wherein the liquid etching medium is directed towards the solid surface as a liquid jet.
Dependencies are inferred from the claim text.