Apparatus and method for producing microcomponents and use of
AssigneeR3T GmbH Rapid Reactive Radicals Technology
InventorJosef MATHUNI
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Abstract
An apparatus and the use of such an apparatus and method for producing microcomponents with component structures are presented which are generated in a process chamber on a substrate according to the LIGA method for example and are stripped from the enclosing photoresist with the help of a cooled remote plasma source.
Claims13
A method for producing microcomponents with component structures which are produced on a substrate by using the LIGA method for example, with the microcomponents being stripped in an etching chamber from photoresist based on epoxy resin, characterized in that the photoresist is stripped in a controlled manner with a cooled remote plasma source by chemical etching through increased density of the radicals, with the temperatures of the microcomponents being monitored individually and the temperature curves being subjected to an individual recognition of the end point.
Dependencies are inferred from the claim text.