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US 2009/0211884 A1Published application
Electronic apparatus with a micro-electromechanical switch made of a piezoeletric material
AssigneeKoninklijke Philips Electronics N.V.
InventorsHeiko Pelzer, Peter Gerard Steeneken, Astrid Lewalter
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Abstract
The device improved according to the invention comprises a micro-electromechanical switch (MEMS) with a piezoelectric element connected to a mechanical support on both sides at the edges. The electrode design of this piezoelectric element is characterized by two electrodes mounted on at least one of the surfaces.
Claims11
An electronic device with a micro-electromechanical switch, comprising:
- a piezoelectric element with a piezoelectric layer located between a first and a second electrode layer with at least one electrode being located in each of said electrode layer
- a first and a second MEMS electrode said first MEMS electrode being located on a surface of the piezoelectric element and said second MEMS electrode being located on the surface of a substrate so that the first MEMS electrode moves away from and/or towards the second MEMS electrode under the application of an actuating voltage to the piezoelectric element
- characterized in that at least one of the electrode layers is structured into electrodes while defining a displacement area in the piezoelectric element in which displacement area the first MEMS electrode is located and which displacement area is, under the application of at least one actuating voltage to the electrodes capable of strong displacement away from and/or towards the substrate in relation to the rest of the piezoelectric element
Dependencies are inferred from the claim text.