Cooling plates and semiconductor apparatus thereof
AssigneeApplied Materials, Inc.
InventorsHELDER LEE, Miriam Schwartz, Michael Kuchar, Aaron Webb, Theodoss Costuros
Life of this patent
Estimating the term…
Abstract
A cooling plate includes a channel to transmit a fluid, wherein the channel is disposed within a base and the channel has a first portion and a second portion. The first portion is disposed substantially along a peripheral edge of the base, and the second portion is coupled to the first portion and is disposed further away from the peripheral edge of the base than the first portion. The second portion has a length that is at least about 35% as long as the length of the first portion. The cooling plate also includes a lid disposed over the base and the channel, wherein the lid provides support for a substrate.
Claims26
A cooling plate comprising:
- a channel to transmit a fluid, wherein the channel is disposed within a base and the channel has a first portion and a second portion, wherein the first portion is disposed substantially along a peripheral edge of the base, and the second portion is coupled to the first portion and is disposed further away from the peripheral edge of the base than the first portion, the second portion having a length that is at least about 35% as long as the length of the first portion;
- and
- a lid disposed over the base and the channel, wherein the lid provides support for a substrate.
A thermal processing apparatus comprising:
- at least one thermal processing chamber to thermally process a substrate;
- and
- an interface unit connected with the at least one thermal processing chamber, wherein the interface unit includes at least one cooling plate comprising:
- a channel to transmit a fluid, wherein the channel is disposed within a base and the channel has a first portion and a second portion, wherein the first portion is disposed substantially along a peripheral edge of the base, and the second portion is coupled to the first portion and is disposed further away from the peripheral edge of the base than the first portion, the second portion having a length that is at least about 35% as long as the length of the first portion;
- and
- a lid disposed over the base and the channel, wherein the lid provides support for a substrate.
Dependencies are inferred from the claim text.