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AssigneeMicronas GmbH
InventorsMaximilian Fleischer, Uwe Lampe, Hans Meixner, Roland Pohle, Ralf Schneider, Elfriede Simon
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A FET gas sensor having a relatively low operating temperature, for example, room temperature, is free from cross sensitivities from interfering gases by a preceding in-line filter. The sensor's service life is substantially stabilizable by using fabric-like activated charcoal filters which can be regenerated by a moderate temperature increase, and by limiting the diffusion of the analyte gas, which is made possible by the relatively small amount of gas detectable on the sensitive layer of the sensor. This substantially increases the service life of the filters. The gas sensor eliminates cross sensitivities to thereby increase the detection reliability thereof. Also, the gas sensor has relative long term stability and is economical to build. The gas sensor can read relatively weak signals generated by gas-sensitive layers, for example, without other stronger gas signals interfering with the weak signals.
A method for increasing the selectivity of an FET-based gas sensor having a filter permeable to a target gas and which adsorbs gases on a surface of the filter that cause cross sensitivities to the target gas, where the filter is disposed between a gas mixture to be detected and a sensing element of the gas sensor, and where the filter comprises fabric-like activated charcoal, the method comprising the step of heating the sensor to a temperature at which the adsorbed gases are driven off the filter surface to thereby regenerate the filter.
A method for increasing the selectivity of an FET-based gas sensor having a filter permeable to the target gas and which adsorbs gases on a surface of the filter that cause cross sensitivities to the target gas, where the filter is disposed between a gas mixture to be detected and a sensing element of the gas sensor, the method comprising the step of reducing diffusion of the gas mixture to the filter by a predetermined amount that delays saturation of the filter by a predetermined time period.
An FET gas sensor, comprising:
An FET gas sensor, comprising:
An FET gas sensor, comprising:
Dependencies are inferred from the claim text.