Method for fabricating probe needle tip of probe card
AssigneesByung Ho Jo, Microfriend Inc.
InventorByung Ho Jo
Life of this patent
Estimating the term…
Abstract
Disclosed herein is a method for fabricating a probe needle tip of a probe card, in which, in order to prevent a poor grinding effect caused by irregular removal or flexibility of the photoresists laminated to be high in the course of polishing a first metal loaded into the opening of the photoresists laminated into a multilayer configuration upon formation of the probe needle tip of the probe card, a second metal is laminated on any one of one or more stacked photoresist layers, thus firmly holding the photoresist layers on/beneath the metal.
Claims6
A method for fabricating a probe needle tip of a probe card, comprising:
- a first step of applying a photoresist on a seed layer;
- a second step of radiating light onto the photoresist through a mask having a predetermined pattern, thus forming an opening in the photoresist according to the pattern of the mask;
- a third step of filling the opening with a first metal;
- a fourth step of evenly grinding the first metal to be flush with the photoresist;
- a fifth step of laminating a seed layer and a second metal on a surface of the first metal which is ground;
- a sixth step of repeating the above-mentioned steps to obtain a desired number of layers;
- and
- a seventh step of removing the metal and photoresist using an etchant, thus forming the probe needle tip.
A method for fabricating a probe needle tip of a probe card, comprising:
- a first step of applying a photoresist on a seed layer;
- a second step of radiating light onto the photoresist through a mask having a predetermined pattern, thus forming an opening in the photoresist according to the pattern of the mask;
- a third step of laminating the seed layer on the photoresist and then plating it with a second metal;
- a fourth step of filling the opening with a first metal;
- a fifth step of evenly grinding the first metal to expose the second metal;
- a sixth step of repeating the above-mentioned steps to obtain a desired number of first metal layers;
- a seventh step of conducting an annealing process to alloy the second metal with the first metal at an interface with the first metal so as not to remove an alloyed portion from the second metal upon removal of the second metal;
- and
- an eighth step of removing the second metal and photoresist using an etchant, thus forming the probe needle tip.
Dependencies are inferred from the claim text.