Lift pin for substrate processing
AssigneeApplied Materials, Inc.
InventorsALEXANDER N. LERNER, Mehran Behdjat, Paula Valdivia
Life of this patent
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Abstract
A lift pin is provided for manipulating a substrate above a support surface of a substrate support and uniformly transferring heat from the substrate support to the substrate. The lift pin includes a pin shaft. The pin shaft includes a cross-section having at least three equal edges and round corners configured alternatively. A pin head is an end portion of the pin shaft, wherein the pin head has a convex support surface larger than the cross-section of the pin shaft. A flat portion is disposed on a central area of the convex support surface for directly contacting the substrate.
Claims18
A lift pin for manipulating a substrate above a support surface of a substrate support, the lift pin comprising:
- a pin shaft comprising a cross-section having at least three equal edges and round corners configured alternatively;
- a pin head being an end portion of the pin shaft, wherein the pin head has a convex support surface larger than the cross-section of the pin shaft;
- and
- a flat portion disposed on a central area of the convex support surface for directly contacting the substrate.
A substrate support assembly for manipulating a substrate above thereof, the substrate support assembly comprising:
- a lift pin assembly having a plurality of lift pins, wherein each lift pin comprises:
- a pin shaft comprising a cross-section having at least three equal edges and round corners configured alternatively;
- a pin head being an end portion of the pin shaft, wherein the pin head has a convex support surface larger than the cross-section of the pin shaft;
- a flat portion disposed on a central area of the convex support surface for directly contacting the substrate;
- and
- a substrate support, having a plurality of pin holes through which the plurality of lift pins are movable for manipulating the substrate.
Dependencies are inferred from the claim text.