Methods for reducing polarization aberration in optical systems
AssigneeASML Netherlands B.V.
InventorJames P. McGuire, JR.
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AssigneeASML Netherlands B.V.
InventorJames P. McGuire, JR.
Estimating the term…
An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.
A method of reducing the retardance caused by intrinsic birefringence in an optical system comprising a plurality of [111] cubic crystalline optical elements with respective [111] crystal axes aligned along an optical axis, said method comprising:
Dependencies are inferred from the claim text.