Image sensor and method for manufacturing the same
OwnerJea-Hee Kiminventor
Life of this patent
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Abstract
A method for manufacturing the image sensor includes: forming a photoresist layer on a surface of an image sensor; exposing and developing the photoresist layer using a mask used for fabricating a plurality of micro-lenses, which has a number of first light shielding patterns aligned apart from one another and a number of second light shielding patterns, each being formed at a part, on which four adjacent edges of the first light shielding patterns are centered, so that a photoresist pattern is formed; and reflowing the photoresist pattern to fabricate a plurality of micro-lenses and a concave lens at each part, on which four adjacent edges of the micro-lenses are centered.
Claims20
A microlens mask comprising:
- a plurality of first light shielding patterns aligned apart from one another;
- and
- a second light shielding pattern formed at a location substantially central to a set of adjacent edges of the plurality of first light shielding patterns.
A method comprising:
- forming a photoresist layer on a surface of an image sensor;
- and then
- exposing and developing the photoresist layer using a mask used for fabricating a plurality of micro-lenses, so as to form a photoresist pattern, wherein the mask includes a plurality of first light shielding patterns aligned apart from one another and a plurality of second light shielding patterns, each being formed at a location substantially central to four adjacent edges of the plurality of first light shielding patterns;
- and then
- reflowing the photoresist pattern to fabricate a plurality of micro-lenses and a concave lens at a part, on which four adjacent edges of the micro-lenses are centered.
A device comprising:
- a plurality of photo-diodes;
- a plurality of color filter layers corresponding to the photo-diodes, respectively;
- a plurality of micro-lenses corresponding to the color filter layers, respectively;
- and
- a plurality of concave lenses formed over the microlenses at a location substantially central to adjacent edges of the micro-lenses.
Dependencies are inferred from the claim text.