Sputtering apparatus and method of manufacturing flat display device using the sputtering apparatus
OwnerKyoung-Won Naminventor
Life of this patent
Estimating the term…
Abstract
Provided is a sputtering apparatus which can check a short-circuit of a mask during a non-discharge period, the sputtering apparatus including: a substrate support, which is installed inside a chamber and supports a substrate; a target, which includes a target material that is to be deposited on the substrate; a mask, which is spaced apart from the substrate so as to surround the peripheral part of the substrate; a shield, which supports the mask and is connected to ground; an insulating member, which combines the mask and the shield and includes an insulating material; and a short-circuit detecting apparatus for detecting a short-circuit of the mask during a non-discharge period of the sputtering apparatus.
Claims20
A sputtering apparatus comprising:
- a chamber;
- a substrate support installed in the chamber for supporting a substrate;
- a target installed in the chamber, the target comprising a target material to be
- deposited on the substrate and a target support supporting the target material;
- a mask spaced apart from the substrate to mask the peripheral portion of the substrate;
- a shield shielding a peripheral portion of the substrate support from deposition from the target material, the shield connected to ground;
- an electrical insulating member linking the mask and the shield and electrically insulating the mask from the shield;
- and
- a short-circuit detecting apparatus connected to the mask, the short-circuit detecting apparatus detecting a short-circuit of the mask during a non-discharge period of the sputtering apparatus.
A sputtering apparatus comprising:
- a chamber;
- a substrate support installed in the chamber for supporting a substrate;
- a target installed in the chamber, the target comprising a target material to be deposited on the substrate and a target support supporting the target material;
- a first power supplier providing a negative voltage to the target support;
- a mask spaced apart from the substrate to mask the peripheral portion of the substrate;
- a shield shielding a peripheral portion of the substrate support from deposition from the target material, the shield connected to ground;
- an electrical insulating member linking the mask and the shield and electrically insulating the mask from the shield;
- and
- a short-circuit detecting apparatus connected to the mask, the short-circuit detecting apparatus including a second power supplier to supply a predetermined power to the mask during a non-discharge period and detecting the short-circuit of the mask by measuring a voltage drop or a current change between the mask and the second power supplier.
A sputtering apparatus comprising:
- a chamber;
- a substrate support installed in the chamber for supporting a substrate;
- a target installed in the chamber, the target comprising a target material to be deposited on the substrate and a target support supporting the target material;
- a mask spaced apart from the substrate to mask the peripheral portion of the substrate;
- a shield shielding a peripheral portion of the substrate support from deposition from the target material, the shield connected to ground;
- an electrical insulating member linking the mask and the shield and electrically insulating the mask from the shield;
- and
- a short-circuit detecting apparatus connected to the mask, the short-circuit detecting apparatus comprising:
- a power supplier supplying a predetermined power to the mask;
- a switch turned on to electrically connect the power supplier and the mask during a discharge period of the sputtering apparatus and turned off to electrically disconnect the power supplier and the mask during a non-discharge period of the sputtering apparatus;
- and
- a detector detecting a voltage or a current between the mask and the power supplier during the non-discharge period to determine the short-circuit of the mask.
Dependencies are inferred from the claim text.