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US 2009/0151451 A1Published application
Method for manufacturing a micromechanical component having a volume-elastic medium and micromechanical component
AssigneeRobert Bosch GmbH
InventorsWolf-Ingo Ratzel, Christian Ohl, Juergen Kurle
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Abstract
A method for manufacturing a micromechanical component is described, the micromechanical component having a medium. The medium has settable and changeable volume-elastic properties and generally completely encloses a sensor module and/or a module housing. The medium preferably has a low-pass response.
Claims19
A method for manufacturing a micromechanical component, comprising:
- positioning a sensor module or a module housing enclosing the sensor module in relation to an external housing;
- and
- enclosing completely at least one of the sensor module and the module housing a volume-elastic medium.
A micromechanical component, comprising:
- a housing;
- a sensor module positioned in the housing;
- and
- a volume-elastic medium enclosing completely the sensor, the medium having a frequency filtering response.
1 more element
A micromechanical component, comprising:
- an external housing;
- a sensor module;
- a module housing enclosing the sensor module, the module housing being positioned in the external housing;
- and
- a volume-elastic medium completely enclosing the module housing, the medium having a frequency filtering response.
2 more elements
Dependencies are inferred from the claim text.