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US 2009/0085686 A1Published application
Integrated binary phase shift keying with silicon mems resonators
AssigneeInfineon Technologies AG
InventorsFlorian Schon, Wolfgang Raberg, Bemhard Winkler
Life of this patent
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Abstract
A modulator includes a micro-electromechanical resonator device configured to receive an input signal and generate two output signals in response thereto, wherein the two signals having a predetermined phase relationship therebetween. The modulator further includes a switching system configured to selectively pass one of the two signals to an output of the modulator in an alternating fashion in response to phase modulation data.
Claims25
A modulator, comprising:
- a micro-electromechanical resonator device configured to receive an input signal and generate first and second output signals in response thereto, the first and second output signals having a predetermined phase relationship therebetween;
- and
- a switching system configured to selectively pass one of the first and second output signals to an output of the modulator in response to phase modulation data.
A micro-electromechanical resonator structure comprising:
- a free standing resonator structure overlying a semiconductor substrate and anchored thereto;
- an input signal structure configured to receive an input signal and exert a force on the free standing resonator structure as a function thereof, thereby causing the free standing resonator structure to move;
- and
- an output signal structure configured to generate first and second output signals having a predetermined phase relationship therebetween as a function of the movement of the free standing resonator structure.
1 more element
A modulator, comprising:
- a micro-electromechanical resonating means operable to receive an input signal and generate first and second output signals having a predetermined phase relationship therebetween;
- and
- switching means operable to selectively pass one of the first and second output signals to an output of the modulator in response to a modulation data signal.
A method of modulating a signal, comprising:
- providing an input signal;
- moving a micro-electromechanical resonator structure as a function of the input signal;
- sensing a change in capacitance of a capacitive element as a function of the movement of the micro-electromechanical resonator structure;
- and
- generating an output signal as a function of the change in capacitance.
2 more elements
Dependencies are inferred from the claim text.