US 2009/0024689 A1 · INTERFACE DEVICE FOR SEMICONDUCTOR EQUIPMENT AND MONITORING SYSTEM USING IT

Abstract

An interface device for semiconductor equipment which converts messages of semiconductor equipment received and transmitted via different protocols to integral XML (extensible Markup Language) message format, and the monitoring system using same is capable of distributed or integral message monitoring of the semiconductor equipment. The monitoring system comprising an interface device for semiconductor equipment capable of converting messages of semiconductor equipment received and transmitted via different protocols to integral XML message format, and classifying the message converted to XML format based on message characteristic. A monitoring server provided with the XML messages classified and outputted by the interface device for semiconductor equipment to perform monitoring for each message characteristic, such that an integrated monitoring or a distributed monitoring for each message characteristic relative to the messages outputted from multiple semiconductor equipment can be made possible on the web portals.

Claims7

Dependent claims

An interface device for semiconductor equipment comprising:

an SECS (Semiconductor Equipment Communication Standard)-I process module for receiving a semiconductor equipment message transferred via SECS-I protocol to analyze a header of the message and extracting data included in the message;
an HSMS (High-Speed SECS Message Service) process module for receiving semiconductor equipment message transferred via HSMS protocol to analyze a header of the message and extracting data included in the message;
a data process module for mapping the message data extracted from the SECS-I process module and the HSMS process module to a pre-set self description element;
and
an XML (extensible Markup Language) conversion module for converting the message data mapped to the self description element at the data process module to a message in the form of XML.

2 more elements

A monitoring system using an interface device for semiconductor equipment comprising:

a plurality of monitoring servers existing on web portals;
and
an interface device for semiconductor equipment for receiving message transferred via different protocols from the semiconductor equipment to convert a message format of the received message to XML format and classifying the converted message in response to the message characteristic to transfer the converted message to any one monitoring server out of the plurality of monitoring servers.

Dependencies are inferred from the claim text.

Interface device for semiconductor equipment and monitoring system using it

Life of this patent

Interface device for semiconductor equipment and monitoring system using it

Life of this patent

Abstract

Claims7