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US 2009/0024344 A1Published application
Method for correcting an error of the imaging system of a coordinate measuring machine
AssigneeVistec Semiconductor Systems GmbH
InventorsMichael Heiden, Klaus Rinn
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Abstract
A method for correcting an error of the imaging system of a coordinate measuring machine is disclosed. The position of at least two different edges of at least one structure on a substrate is measured. The substrate may be automatically rotated into another orientation. Then the position of the at least two different edges of the at least one structure is measured on the rotated substrate. Based on the measurement data, a systematic error of the imaging system is eliminated.
Claims14
A method for correcting an error of an imaging system of a coordinate measuring machine, comprising the steps of:
- measuring a position of at least one edge of at least one structure on a substrate, wherein the substrate is positioned in a first orientation in the coordinate measuring machine, and the position of the at least one edge is determined within a measurement window, defined in the coordinate system of a camera;
- setting a second orientation of the substrate differing from the first orientation;
- measuring a further position of the at least one edge of the at least one structure on the substrate in the second orientation, wherein the at least one edge of the structure is after the rotation at the same location within the measurement window as without rotation;
- and
- eliminating a systematic error of the imaging system of a measurement optic, of the coordinate measuring machine.
2 more elements
Dependencies are inferred from the claim text.