Dual-mode robot systems and methods for electronic device manufacturing

An electronic device manufacturing system, comprising:

• a factory interface adapted to receive a substrate carrier;
• a robot disposed within the factory interface and adapted to operate in a first mode and a second mode,
• wherein, in the first mode, the robot is adapted to transfer a substrate between the substrate carrier and one or more tools, and
• wherein, in the second mode, the robot is adapted to function as a stage for performing metrology on the substrate;
• and
• a metrology sensor disposed within the factory interface and adapted to output information about the substrate when the robot operates in the second mode.

A substrate transfer apparatus, comprising:

• a robot disposed within a factory interface and adapted to operate in a transfer mode and a process mode,
• wherein, in the transfer mode, the robot is adapted to transfer a substrate between a substrate carrier and one or more tools, and
• wherein, in the process mode, the robot is adapted to function as a stage for performing a process on the substrate;
• and
• a process tool disposed within the reach of the robot operating in the process mode and adapted to apply a process to the substrate when the robot operates in the process mode.

A method for manufacturing an electronic device, comprising the steps of:

• removing a substrate from a first system component selected from a group consisting of a tool, a substrate carrier, and a factory interface;
• transferring the substrate to a second system component selected from a group of a tool, a factory interface, and a substrate carrier;
• and
• performing metrology on the substrate as the substrate is transferred from the first system component to the second system component.

A method of calibrating a robot, comprising the steps of:

• calibrating a robot for transferring substrates;
• loading a metrology calibration substrate on the robot;
• locking the robot into a metrology motion profile;
• and calibrating the robot for performing metrology.