Method for fabricating embedded static random access memory
AssigneeUnited Microelectronics Corp.
InventorsTung-Hsing Lee, Chien-Li Kuo, Yun-San Huang, Chih-Ming Su, Buo-Chin Hsu
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AssigneeUnited Microelectronics Corp.
InventorsTung-Hsing Lee, Chien-Li Kuo, Yun-San Huang, Chih-Ming Su, Buo-Chin Hsu
Estimating the term…
The present invention provides a method for fabricating an embedded static random access memory, including providing a semiconductor substrate; defining a logic area and a memory cell area on the semiconductor substrate and defining at least a first conductive device area and at least a second conductive device area in the logic area and the memory cell area respectively; forming a patterned mask on the memory cell area and on the second conductive device area in the logic area and exposing the first conductive device area in the logic area; performing a first conductive ion implantation process on the exposed first conductive device area in the logic area; and removing the patterned mask.
A method for fabricating an embedded static random access memory, comprising:
A method for fabricating an embedded static random access memory, comprising:
A method for fabricating an embedded static random access memory, comprising:
Dependencies are inferred from the claim text.