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US 2009/0023238 A1Published application
Method to form an optical grating and to form a distributed feedback laser diode with the optical grating
AssigneeSumitomo Electric Industries, Ltd.
InventorMasaki Yanagisawa
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Abstract
A method for forming a grating with an adjustable pitch and a method for forming a DFB-LD with an optical grating whose pitch is adjustable during the process are disclosed. The method of the invention; first prepares a mold with a pattern to form the grating; second, pushes the mold against the resin as deforming the mold; and third, hardens the mold. The resin with a periodic pattern whose pitch is adjustable during the process is available.
Claims11
A method for forming an optical grating on a substrate, comprising steps of:
- preparing a mold made of elastic material, said mold having a periodic pattern to form said optical grating;
- pushing said mold against a resin coated on said substrate as said mold is deformed;
- and
- hardening said resin as said mold is pushed against thereto.
1 more element
A method to form a distributed feedback laser diode, comprising steps of:
- growing a stack of semiconductor layers on a semiconductor substrate, said stack includes a lower cladding layer, a lower optical confinement layer, an active layer, an upper separate optical confinement layer, and an optical grating layer;
- forming a periodic pattern made of resin on said optical grating layer, said step to form said periodic pattern including,
- coating a resin on said optical grating layer,
- pushing a mold made of elastic material against said resin as said mold is deformed, and
- hardening said resin as said mold is pushed thereto;
- etching said grating layer by said periodic pattern as an etching mask to form a periodic pattern in said optical grating layer;
- and
- burying said periodic pattern in said optical grating layer by growing an upper cladding layer.
5 more elements
Dependencies are inferred from the claim text.