Slit coater having apparatus for supplying a coater solution
AssigneeLG Display Co., Ltd.
InventorsO. Jun Kwon, Kang II Cho
Life of this patent
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Abstract
A slit coater including an apparatus for supplying coating solution by a coating method using a slit nozzle, which is configured to minimize contamination of coating solution, utilizing a filtering function, and supplying a controlled amount of photosensitive solution to a slit nozzle. The slit coater further includes a table on which an object to be processed is mounted, a slit nozzle unit that applies coating solution onto a surface of the object to be processed, and a coating solution supply apparatus including a storage tank that stores the coating solution, a pump that supplies the coating solution stored in the storage tank to the slit nozzle unit, and a buffer tank that is in fluid communication with the pump and the storage tank.
Claims9
A method for fabricating an LCD device using a slit coater, the method comprising:
- providing a table on which an LCD substrate is mounted;
- and
- applying a coating solution onto the substrate using a slit nozzle,
- wherein the coating solution is supplied to the slit nozzle by a coating solution supply apparatus including a storage tank configured to store the coating solution, a pump that supplies the coating solution stored in the storage tank to the slit nozzle unit through a first valve, and a sealed buffer tank in fluid communication with the pump and the storage tank, a second valve placed between the buffer tank and the slit nozzle unit, a drain placed between the second valve and the buffer tank and a third valve placed between the drain and the buffer tank;
- and
- removing air bubbles through the drain in a state that the second valve or third valve is opened and air is injected into the storage tank.
Dependencies are inferred from the claim text.