Method for Producing Sputtering Target Material for Ni-W Based Interlayer
AssigneeSanyo Special Steel Co., Ltd.
InventorsToshiyuki Sawada, Akihiko Yanagitani
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AssigneeSanyo Special Steel Co., Ltd.
InventorsToshiyuki Sawada, Akihiko Yanagitani
Estimating the term…
There is provided a method for producing sputtering target materials which are used for a Ni—W based interlayer in a perpendicular magnetic recording medium. In this producing method, a Ni—W based alloy powder is prepared as a raw material powder. The alloy powder comprises 5 to 20 at % of W and the balance Ni and unavoidable impurities and is produced by gas atomization. The raw material powder is consolidated at a temperature ranging from 900 to 1150° C. This producing method makes it possible to significantly restrain expansion of the powder-filled billet in the consolidation step, thus efficiently producing Ni—W based sputtering target materials with stable qualities.
A method for producing a sputtering target material for a Ni—W based interlayer, comprising the steps of:
Dependencies are inferred from the claim text.