Optical Imaging Device Having At Least One System Diaphragm

An optical imaging device, in particular an objective for semiconductor lithography, having at least one system diaphragm, the system diaphragm comprising a multiplicity of mobile plates which are rotatably mounted, wherein the plates have a spherical curvature.

A variable system diaphragm for a microlithographic projection exposure apparatus having a multiplicity of plates held in a mobile fashion by means of solid state articulations.

A variable system diaphragm having a multiplicity of mobile plates, the plates having a spherical curvature and being rotationally mounted, rotational bearing axes of the plates being aligned with a center of curvature (C) of a sphere, and the sphere determining a surface on which the plates are mobile relative to one another.

A projection objective in semiconductor lithography having optical elements, at least one variable system diaphragm for a microlithographic projection exposure apparatus being provided for introduction into a concave surface of an optical element, the diaphragm following a curved surface.