Electromagnetic radiation detector and method for manufacturing such a detector
AssigneeUlis
InventorMichel VILAIN
Life of this patent
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Abstract
This electromagnetic radiation detector comprises a reflecting substrate and at least one detection element comprising a membrane sensitive to said radiation and suspended above the substrate. The distance between the membrane and at least one detection element and the substrate is variable, said distance having a predefined spatial distribution suitable for minimizing the rapid variations of a response of the radiation detector in at least one predefined wavelength range.
Claims12
A detector of electromagnetic radiation comprising a reflecting substrate and at least one detection element comprising a membrane sensitive to said radiation and suspended above the substrate, wherein the distance between the membrane and at least one detection element and the substrate is variable, said distance having a predefined spatial distribution suitable for minimizing the rapid variations of a response of the detector to the radiation in at least one predefined wavelength range.
A method for manufacturing an electromagnetic radiation detector, of the type comprising a step of formation of a reflecting substrate and of a membrane, of at least one detection element sensitive to a radiation, and a step of suspension of the membrane above the substrate, wherein the step of formation of the substrate and of the membrane comprises a step of creation of 3D motifs in the substrate and/or the membrane, so that the distance between the substrate and the membrane is variable in order to have a predefined spatial distribution suitable for minimizing the rapid variations of a response of the radiation detector in at least one predefined wavelength range.
Dependencies are inferred from the claim text.