Chemical solution vaporizing tank and chemical solution treating system

A chemical solution vaporizing tank for producing a processing gas by supplying a vaporization gas to a chemical solution stored in the chemical solution vaporizing tank, and supplying the processing gas to a work for performing processing, comprising:

• a tank body having an internal space laterally and airtightly partitioned by a partition member into a plurality of vaporizing chambers;
• a chemical solution passage located under a liquid level in each of the vaporizing chambers and formed at each partition member for passing the chemical solution between the vaporizing chambers;
• a gas passage located above the liquid level in each of the vaporizing chambers and formed at the partition member to communicate the vaporizing chambers with each other for uniformizing pressures in the respective vaporizing chambers;
• a vaporization gas supply unit arranged at each of the vaporizing chambers for supplying the vaporization gas to the chemical solution in the vaporizing chamber and producing the processing gas in a space above the liquid level of the chemical solution;
• a processing gas takeout passage arranged for each of the vaporizing chambers for externally taking out the processing gas produced in said vaporizing chamber;
• a chemical solution supply passage for supplying the chemical solution to the vaporizing chamber;
• and
• an atmospheric opening for supplying the chemical solution from said chemical solution supply passage to the vaporizing chamber.