Vacuum evaporation apparatus for solid materials

Abstract

The invention relates to an apparatus for evaporating solid materials, for instance, selenium for coating a substrate. The solid material is brought into a first crucible via a feeding source. In this crucible the material melts at a temperature which is preferably slightly higher than its melting point. The molten material flows via a transporting device, for instance, a pipe into a second crucible, where the material evaporates at a temperature higher than its boiling point and is transported to a substrate. In order to stop the evaporation within a very short time preferably within only one to two minutes, a cooling device for cooling the material beyond its melting point is arranged at the transporting device. With this cooling device the material in the transporting device can be cooled down beyond its melting point in a very short time.

Dependencies are inferred from the claim text.