US 2009/0015491 A1 · ELECTROMAGNETIC WAVE SENSOR, IMAGING ELEMENT AND IMAGING DEVICE

Abstract

The present invention enables to provide a simple and inexpensive electromagnetic wave sensor that selectively detects sub-millimeter waves and millimeter waves in a specific frequency band, an imaging element and an imaging device. The distance of the gap between a plurality of antenna elements is smaller than the wavelength of infrared light. A capacitor electrically formed by the gap between the plurality of antenna elements, and an electrical resistor portion form parallel circuits electrically coupled to the antenna portion. The plurality of antenna elements are formed so that the impedance of the antenna portion is matched with the impedance of the parallel circuits against electromagnetic waves having a predetermined frequency, and is not matched against the higher harmonics of electromagnetic waves having the predetermined frequency.

Claims13

Dependent claims

An electromagnetic wave sensor comprising:

a semiconductor substrate having a recess formed on the surface thereof;
a cell portion;
and
a supporting portion having wiring portions electrically connected to the cell portion and supporting the cell portion in or on the recess,
the cell portion comprising:
an antenna portion having a plurality of antenna elements, for detecting incident electromagnetic waves and converting the electromagnetic waves into electrical signals;
an electrical resistor portion disposed below the antenna portion and electrically connected to each of the plurality of antenna elements, for converting electrical energy corresponding to the electrical signals into Joule heat to change the temperature of the cell portion;
and
a thermoelectric conversion element electrically connected to the wiring portions, electrically insulated from the antenna portion and the electrical resistor portion, thermally connected to the electrical resistor portion, and for detecting the temperature change of the cell portion to convert the temperature change into electrical signals, and wherein
the distance of the gap between the plurality of antenna elements is smaller than the wavelength of infrared light.

7 more elements

An electromagnetic wave sensor comprising:

a semiconductor substrate having a recess formed on the surface thereof;
a cell portion;
and
a supporting portion having wiring portions electrically connected to the cell portion and supporting the cell portion in or on the recess;
the cell portion comprising:
an antenna portion having a plurality of antenna elements, for detecting incident electromagnetic waves and converting the electromagnetic waves into electrical signals;
an electrical resistor portion disposed below the antenna portion and electrically connected to each of the plurality of antenna elements, for converting electrical energy corresponding to the electrical signals into Joule heat to change the temperature of the cell portion;
and
a thermoelectric conversion element electrically connected to the wiring portions, electrically insulated from the antenna portion and the electrical resistor portion, thermally connected to the electrical resistor portion, and for detecting the temperature change of the cell portion to convert the temperature change into electrical signals, wherein
the distance of the gap between the plurality of antenna elements is smaller than the wavelength of infrared light;
a capacitor electrically formed by the gap between the plurality of antenna elements and the electrical resistor portion form a parallel circuit electrically coupled to the antenna portion and the plurality of antenna elements are formed so that the impedance of the antenna portion and the impedance of the parallel circuit are matched for electromagnetic waves having a predetermined frequency, but the impedance is not matched for the higher harmonics of electromagnetic waves having the predetermined frequency.

8 more elements

An imaging element comprising:

a semiconductor substrate having a recess formed on the surface thereof;
a plurality of electromagnetic wave sensors disposed in a matrix arrangement as picture element arrays on the semiconductor substrate;
and
a readout circuit for reading the electrical signals corresponding to electromagnetic waves detected by each of the electromagnetic wave sensors;
each of the electromagnetic wave sensor comprising:
a cell portion;
and
a supporting portion having wiring portions electrically connected to the cell portion and supporting the cell portion in or on the recess,
the cell portion comprising:
an antenna portion having a plurality of antenna elements, for detecting incident electromagnetic waves and converting the electromagnetic waves into electrical signals,
an electrical resistor portion disposed below the antenna portion and electrically connected to each of the plurality of antenna elements, for converting electrical energy corresponding to the electrical signals into Joule heat to change the temperature of the cell portion, and
a thermoelectric conversion element electrically connected to the wiring portion, electrically insulated from the antenna portion and the electrical resistor portion, thermally connected to the electrical resistor portion, and for detecting the temperature change of the cell portion to convert the temperature change into electrical signals;
and wherein
the distance of the gap between the plurality of antenna elements is smaller than the wavelength of infrared light.

11 more elements

An imaging device comprising:

an imaging element;
an evacuated package wherein the imaging element is encapsulated;
an optical window disposed in the electromagnetic-wave incidence plane of the package, and transmitting electromagnetic waves of a specific frequency of incident electromagnetic waves;
an optical element for focusing and imaging incident electromagnetic waves on the imaging element in the package through the optical window;
and
a picture signal processing section connected to the imaging element and processing picture signals outputted from the imaging element,
the imaging element comprising:
a semiconductor substrate having a recess formed on the surface thereof;
a plurality of electromagnetic wave sensors disposed in a matrix arrangement as picture element arrays on the semiconductor substrate;
and
a readout circuit for reading the electrical signals corresponding to electromagnetic waves detected by each of the electromagnetic wave sensors as image signals,
each of the electromagnetic wave sensors comprising:
a cell portion;
and
a supporting portion having wirings electrically connected to the cell portion and supporting the cell portion in or on the recess,
the cell portion comprising:
an antenna portion having a plurality of antenna elements, for detecting incident electromagnetic waves and converting the electromagnetic waves into electrical signals;
an electrical resistor portion disposed below the antenna portion and electrically connected to each of the plurality of antenna elements composing the antenna portion, for converting electrical energy corresponding to the electrical signals into Joule heat to change the temperature of the cell portion;
and
a thermoelectric conversion element electrically connected to the wiring portion, electrically insulated from the antenna portion and the electrical resistor portion, thermally connected to the electrical resistor portion, and for detecting the temperature change of the cell portion to convert the temperature change into electrical signals;
and wherein
the distance of the gap between the plurality of antenna elements is smaller than the wavelength of infrared light.

19 more elements

Dependencies are inferred from the claim text.

Electromagnetic wave sensor, imaging element and imaging device

Life of this patent

Electromagnetic wave sensor, imaging element and imaging device

Life of this patent

Abstract

Claims13