Magnetic sensor and production method thereof

A magnetic sensor, comprising:

• a substrate;
• and
• a first sensor bridge circuit, a second sensor bridge circuit, and a third sensor bridge circuit, each of the first sensor bridge circuit, the second sensor bridge circuit, and the third sensor bridge circuit including a pair of magnetic field detectors and a pair of reference resistors arranged on the substrate and connected to form a bridge circuit, each of the magnetic field detectors being formed of a magneto-resistance effect element, each of the reference resistors having a constant resistance value not influenced by an external magnetic field, and magnetization directions of the magnetic field detectors intersect with each other in a three-dimensional manner,
• wherein
• the substrate has a plurality of inclined surfaces, and normal directions of the inclined surfaces intersect with each other in a three-dimensional manner, and
• the magnetic field detectors in each of the first sensor bridge circuit, the second sensor bridge circuit, and the third sensor bridge circuit are arranged on the inclined surfaces having normal directions intersecting with each other in a three-dimensional manner, and
• the pair of the magnetic field detectors in the same one of the first sensor bridge circuit, the second sensor bridge circuit, and the third sensor bridge circuit is arranged on the inclined surface having the same normal direction.

A method of producing a magnetic sensor, comprising the steps of:

• preparing a substrate;
• forming a plurality of inclined surfaces on the substrate, and normal directions of the inclined surfaces intersect with each other in a three-dimensional manner,
• arranging a pair of magnetic field detectors in each of a plurality of sensor bridge circuits in the same inclined surface, each of the sensor bridge circuits including the pair of magnetic field detectors and a pair of fixed resistors arranged on the substrate, the pair of the magnetic field detectors and the pair of the fixed resistors being connected to form a bridge circuit, each of the magnetic field detectors being formed of a magneto-resistance effect element, and
• magnetizing a pinned layer of each of the magnetic field detectors by applying, while heating the substrate, a magnetic field in a direction perpendicular to a surface of the substrate.