Piezoelectric device

Abstract

[Object] To provide a piezoelectric device having excellent drive level characteristics in terms of downsizing, having no remaining stress at the bonding portion of the container and leaving no characteristics deteriorating factors. [Solving Means] A piezoelectric device includes: a base substrate 54, a framed resonator element 55 stacked and fixed on the base substrate, a lid 56 stacked and fixed on the framed resonator element, wherein the base substrate, the framed resonator element, and the lid are made from the same materials or the materials having highly approximate linear coefficients of expansion and the bonding surfaces thereof are bonded with each other by surface activating process so as to be vacuum-sealed.

Dependencies are inferred from the claim text.