Workpiece-transporting arraratus of in-line sputtering machine

Abstract

A workpiece-transporting apparatus of in-line sputtering machine includes a conveyer unit and a carrying salver. The conveyer unit has a holder, and a transporting wheel group is arranged in the holder. A conveyer belt covers around the transporting wheel group. A driving wheel group is arranged in one side of the conveyer belt and located in the holder. The driving wheel group connects to a motor and surrounded by a connecting belt. The carrying salver is placed on the conveyer belt of the conveyer unit. The carrying salver has a base, a plurality of supporting shafts are assembled in the base and linked together for being driven together. A workpiece base is arranged on the supporting shafts. At least one of the supporting shafts is surrounded by a supporting wheel. The supporting wheel engages with the connecting belt for being driven by the connecting belt.

Dependencies are inferred from the claim text.