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US 2009/0014901 A1Published application
Vaporizer for delivery of low vapor pressure gases
AssigneeRASIRC, Inc.
InventorJeffrey J. Spiegelman
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Abstract
A vaporizing device is provided for control, delivery, and purification of low vapor pressure gases in conjunction with carrier gas in micro-electronics and other critical applications.
Claims26
A vaporizer device, the device comprising:
- a mass flow control device configured to control a flow rate of a carrier gas;
- and
- a vaporizer, wherein the vaporizer comprises:
- a source configured to provide a liquid,
- at least one temperature controller configured to control a temperature of at least one of the liquid and the carrier gas, and
- a membrane assembly configured to permit passage therethrough of the liquid but not the carrier gas, whereby the liquid passes through the membrane assembly to contact the carrier gas, thereby yielding a mixture of vapor in the carrier gas, wherein a concentration of the vapor in the carrier gas is determined by the temperature of the liquid, the temperature of the carrier gas, and the flow rate of the carrier gas.
3 more elements
A method for producing a mixture of a vapor in a carrier gas, the method comprising:
- contacting a source liquid at a preselected first temperature with a first side of a membrane, wherein the membrane permits the passage therethrough of the liquid;
- contacting a carrier gas at a preselected second temperature and a preselected flow rate with a second side of the membrane, wherein the membrane resists passage therethrough of the carrier gas;
- and
- contacting, at the second side of the membrane, the carrier gas with liquid that has passed through the membrane, whereby a mixture of a source vapor at a preselected concentration in the carrier gas is generated.
1 more element
Dependencies are inferred from the claim text.