Semiconductor chip, method of fabricating the same and stack package having the same
AssigneeDongbu HiTek Co., Ltd.
InventorsMin-Hyung Lee, Oh-Jin Jung
Life of this patent
Estimating the term…
Loading patent…
AssigneeDongbu HiTek Co., Ltd.
InventorsMin-Hyung Lee, Oh-Jin Jung
Estimating the term…
A semiconductor chip may include a wafer, a semiconductor device formed on the wafer, a first dielectric layer formed on the wafer and the semiconductor device, a first metal interconnection formed on the first dielectric layer, a second dielectric layer formed on the first dielectric layer and the lower interconnection, and a third dielectric layer formed on the second dielectric layer. A second metal interconnection may be formed in the third dielectric layer, a first nitride layer formed on the third dielectric layer and the first metal interconnection, a via hole extending through the wafer, the first dielectric layer, the second dielectric layer, the third dielectric layer and the first nitride layer, a via formed in the via hole and a third metal interconnection formed on the first oxide layer, an exposed upper end of the via and the second metal interconnection.
A semiconductor chip comprising:
A semiconductor chip stack package comprising:
A method of fabricating a semiconductor chip comprising:
Dependencies are inferred from the claim text.