Charged particle beam equipments, and charged particle beam microscope

A charged particle beam microscope comprising:

• a charged particle beam source;
• a charged particle optical system which illuminates a charged particle beam generated from the charged particle beam source on a specimen;
• a deflector which scans the specimen with the charged particle beam;
• a charged particle detector which detects a secondary charged particle or a transmission charged particle generated from the specimen;
• a diffraction pattern detector which detects the intensity of a diffraction pattern generated from the specimen;
• a processor which reconstructs an object image from the intensity of the diffraction pattern detected by the diffraction pattern detector;
• an illumination adjustment system which determines the size of an illumination area of the charged particle beam illuminated on the specimen on the basis of the size of the reconstructed object image;
• and
• an image display unit which displays an image based on an output from the charged particle detector or the diffraction pattern detector.

A charged particle beam microscope comprising:

• a charged particle beam source;
• a charged particle optical system which illuminates a charged particle beam generated from the charged particle beam source on a specimen and which includes an illumination lens and an objective lens;
• a detector which detects a diffraction pattern or a magnified image of the specimen generated by illumination of the charged particle beam;
• a projection lens which magnifies and projects the diffraction pattern or the magnified image to the detector;
• an image display unit which displays an image based on an output from the detector;
• a processor which reconstructs an object image from the intensity of the diffraction pattern output by the detector;
• and
• an illumination adjustment system which determines the size of an illumination area of the charged particle beam illuminated on the specimen on the basis of the size of the reconstructed object image.