Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member

A heating apparatus comprising:

• heating elements arranged of a sheet form and having notches or through holes provided therein;
• a side wall member made of an electrically conductive material and arranged to surround and define the heating space;
• holding members disposed at the heating space side of the side wall member for holding at one end the heating elements;
• and
• extending members, each member comprising an extending-through portion arranged to project from the heating space side of the side wall member and extend through the notch or through hole between both ends in the heating element and a projected portion arranged to project at the side wall member side of the heating element from the extending-through portion in a direction, which is orthogonal to the extending direction of the extending-through portion, thus to inhibit the displacement of the heating elements towards the side wall member.

A heating apparatus comprising:

• heating elements arranged of a zigzag form where the upper turned portions are squared and the lower turned portions are arched;
• and
• insulators for holding the upper portions of the heating element, wherein
• the insulator is arranged to have projections thereof formed to come into direct contact with both ends of two adjacent upper turned portions of the heating element.

A heating apparatus comprising:

• heating elements;
• a first inner shell of a tubular shape disposed at the outside of the heating elements and having a first flange provided at the lower end thereof;
• a second inner shell of a tubular shape disposed at the outside of the heating elements and having a second flange provided at the upper end thereof;
• and
• elastic members disposed between the first flange and the second flange.

A method of manufacturing semiconductor devices comprising:

• loading a substrate into a reactor container;
• and
• heating up the reactor container installed in a heating apparatus which comprises heating elements arranged of a sheet form and having notches or through holes provided therein;
• a side wall member made of an electrically conductive material and arranged to surround and define the heating space;
• holding members disposed at the heating space side of the side wall member for holding at one end the heating elements;
• and extending-though members, each member comprising an extending-through portion arranged to project from the heating space side of the side wall member and extend through the notch or through hole between both ends in the heating element and projected portions arranged to project at both, front and back, sides of the heating element from the extending-through portion in a direction, which is orthogonal to the extending direction of the extending-through portion, thus to inhibit the displacement of the heating elements along the extending direction;
• and processing a substrate.

A method of manufacturing semiconductor devices comprising:

• loading a substrate into a reactor container;
• and
• heating up the reactor container installed in a heating apparatus which comprises heating elements arranged of a sheet form and having notches or through holes provided therein;
• a side wall member made of an electrically conductive material and arranged to surround and define the heating space;
• holding members disposed at the heating space side of the side wall member for holding at one end the heating elements;
• and extending members, each member comprising an extending-through portion arranged to project from the heating space side of the side wall member and extend through the notch or through hole between both ends in the heating element and a projected portion arranged to project at the side wall member side of the heating element from the extending-through portion in a direction, which is orthogonal to the extending direction of the extending-through portion, thus to inhibit the displacement of the heating elements towards the side wall member;
• and processing a substrate.