Flexible thermoelectric device and manufacturing method thereof
AssigneeIndustrial Technology Research Institute
InventorsChih-Kuang Yu, Chun-Kai Liu, Ming-Ji Dai
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AssigneeIndustrial Technology Research Institute
InventorsChih-Kuang Yu, Chun-Kai Liu, Ming-Ji Dai
Estimating the term…
A flexible thermoelectric device and a manufacturing method thereof are provided. Flexible substrates are formed by using LIGA process, micro-electro-mechanical process or electroforming technique. The flexible substrates are used to produce thermoelectric device. The structure and the material property of the substrates offer flexible property and tensile property to the thermoelectric device. Thermal transfer enhancement structures such as thermal via or metal diffusion layer are formed on the flexible substrates to overcome the low thermal transfer property of the flexible substrates.
A flexible thermoelectric device, comprising:
A method for manufacturing a flexible thermoelectric device, comprising:
Dependencies are inferred from the claim text.