Back to results
US 2008/0305941 A1Published application
Titania-doped quartz glass for nanoimprint molds
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsShigeru MAIDA, Hisatoshi OTSUKA
Life of this patent
Estimating the term…
Abstract
In the nanoimprint lithography, a titania-doped quartz glass having a CTE of −300 to 300 ppb/° C. between 0° C. and 250° C. and a CTE distribution of up to 100 ppb/° C. at 25° C. is suited for use as nanoimprint molds.
Claims8
A titania-doped quartz glass for use as nanoimprint molds, having a coefficient of linear thermal expansion (CTE) in the range of −300 to 300 ppb/° C. between 0° C. and 250° C. and a CTE distribution of up to 100 ppb/° C. at 250° C.
Dependencies are inferred from the claim text.