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US 2008/0305940 A1Published application
Titania-doped quartz glass for nanoimprint molds
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsShigeru MAIDA, Hisatoshi OTSUKA
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Abstract
In the nanoimprint lithography, titania-doped quartz glass having an internal transmittance distribution of up to 10% at wavelength 365 nm is suited for use as nanoimprint molds.
Claims9
A titania-doped quartz glass for use as nanoimprint molds, having an internal transmittance distribution of up to 10% with respect to UV radiation of 365 nm wavelength.
Dependencies are inferred from the claim text.