Method for forming electrode structure for use in light emitting device and method for forming stacked structure

A method for forming an electrode structure in a light emitting device, the method comprising the steps of:

• (A) forming a mask material layer on a compound semiconductor layer, the mask material layer including an opening having an average top diameter RT and an average bottom diameter RB (wherein RB>RT);
• (B) depositing a first material layer composed of a conductive material on the mask material layer and on a portion of the compound semiconductor layer exposed through the bottom of the opening by a physical vapor deposition method reducing the particle density of a material to be deposited so that the mean free path for collision is long;
• (C) depositing a second material layer on the first material layer on the mask material layer, on the first material layer deposited on the bottom of the opening, and on a portion of the compound semiconductor layer exposed through the bottom of the opening by a vapor deposition method other than the physical vapor deposition method;
• and
• (D) removing the mask material layer and the first and second material layers deposited on the mask material layer, whereby the electrode structure composed of the first material layer and the second material layer is formed.