Method of fabricating semiconductor light emitting device substrate

Abstract

A method of fabricating a substrate for semiconductor light emitting devices is provided. The method includes forming a nanocrystal structure on a surface of the substrate which is a single crystal material, wherein the nanocrystal structure has an etched region and an unetched region. Next, a nitride semiconductor material is grown on the surface of the single crystal material with an epitaxial process, so as to form a substrate. Due to the periodicity of the nanocrystal structure, the semiconductor material grown on the substrate has fewer defects, and the material stress is reduced. Besides, the nanocrystal structure is capable of diffracting an electromagnetic wave, such that a higher light emitting efficiency and a higher output power may be obtained accordingly.

Dependencies are inferred from the claim text.