Turbo-molecular pump
AssigneeShimadzu Corporation
InventorTakuto ONISHI
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Abstract
Disclosed is a turbo-molecular pump, which comprises: a blade pumping section having a plurality of rotor blades and a plurality of stator blades which are alternately arranged in plural stages along an axial direction of the pump; and a thread groove pumping section having a cylindrical-shaped screw stator, and a rotor cylinder adapted to be rotated inside the screw stator. The rotor cylinder has a lower edge surface located on an upstream side relative to a downstream edge of the screw stator with respect to the axial direction. The turbo-molecular pump of the present invention can minimize flying-out of broken pieces of the rotor cylinder from a discharge port.
Claims11
A turbo-molecular pump comprising:
- a blade pumping section having a plurality of rotary blades and a plurality of stationary blades which are alternately arranged in plural stages along an axial direction of said pump;
- and
- a drag pumping section having a cylindrical-shaped stator member, and a rotary cylinder adapted to be rotated inside said stator member,
- wherein said rotary cylinder has a downstream edge located on an upstream side relative to a downstream edge of said stator member with respect to said axial direction.
Dependencies are inferred from the claim text.